물 자연 그리고 사람 - 물로 더 행복한 세상을 만들어가겠습니다.
HOME성과논문실적
논문실적
| 반도체용 초순수용 탈기막(MDG)공정 개발 |
|---|
|
학술지명 대한환경공학회 국내학술대회 특별세션
저자 권병수
발표일 2019-12-13
|
|
In the evaluation of the MDG hollow fiber membrane, the removal efficiency of the domestic membrane was better. However, evaluating the module lowers the efficiency. The packing efficiency of the module is low and the resistance of the membrane is increased, resulting in low removal efficiency. Improvement of domestic MDG membrane should reduce the pore size of membrane and reduce the thickness of membrane. As a result, the dissolved oxygen removal efficiency of domestic MDG membrane can be improved. |
